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1. Identity statement
Reference TypeJournal Article
Sitemtc-m21d.sid.inpe.br
Holder Codeisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identifier8JMKD3MGP3W34T/47BDHRB
Repositorysid.inpe.br/mtc-m21d/2022/07.26.10.36   (restricted access)
Last Update2022:07.26.10.36.10 (UTC) simone
Metadata Repositorysid.inpe.br/mtc-m21d/2022/07.26.10.36.10
Metadata Last Update2023:01.03.16.46.11 (UTC) administrator
DOI10.1016/j.surfcoat.2022.128716
ISSN0257-8972
Citation KeyCapoteSánchezCapoCoraTrav:2022:EfLoDe
TitleEffect of low-pressure deposition on the mechanical and tribological properties of a-C:H films deposited via modified pulsed-DC PECVD with active screen as an additional cathode
Year2022
MonthSept.
Access Date2024, May 19
Type of Workjournal article
Secondary TypePRE PI
Number of Files1
Size3021 KiB
2. Context
Author1 Capote Sánchez, Ariel
2 Capote, G.
3 Corat, Evaldo José
4 Trava-Airoldi, Vladimir Jesus
Resume Identifier1
2
3 8JMKD3MGP5W/3C9JH33
Group1 CMS-ETES-DIPGR-INPE-MCTI-GOV-BR
2
3 COPDT-CGIP-INPE-MCTI-GOV-BR
4 COPDT-CGIP-INPE-MCTI-GOV-BR
Affiliation1 Instituto Nacional de Pesquisas Espaciais (INPE)
2
3 Instituto Nacional de Pesquisas Espaciais (INPE)
4 Instituto Nacional de Pesquisas Espaciais (INPE)
Author e-Mail Address1 capotesanchezariel@gmail.com
2
3 evaldo.corat@inpe.br
4 vladimirjta@gmail.com
JournalSurface and Coatings Technology
Volume445
Pagese128716
Secondary MarkA1_MATERIAIS A1_ENGENHARIAS_II A2_SAÚDE_COLETIVA A2_INTERDISCIPLINAR A2_GEOCIÊNCIAS A2_ENGENHARIAS_III B1_ODONTOLOGIA B1_MEDICINA_II B1_ENGENHARIAS_IV B1_ASTRONOMIA_/_FÍSICA B2_QUÍMICA B2_CIÊNCIAS_BIOLÓGICAS_I
History (UTC)2022-07-26 10:36:10 :: simone -> administrator ::
2022-07-26 10:36:11 :: administrator -> simone :: 2022
2022-07-26 10:37:00 :: simone -> administrator :: 2022
2023-01-03 16:46:11 :: administrator -> simone :: 2022
3. Content and structure
Is the master or a copy?is the master
Content Stagecompleted
Transferable1
Content TypeExternal Contribution
Version Typepublisher
KeywordsAdditional cathode
Deposition pressure
Diamond-like carbon
Mechanical properties
PECVD
Tribology
AbstractDue to their attractive mechanical, chemical, tribological, and biological properties, diamond-like carbon (DLC) coatings are widely used in many industrial applications. Normally, the deposition of amorphous hydrogenated carbon (a-C:H) films is obtained via the plasma-enhanced chemical vapor deposition (PECVD) technique. Recently, a modified pulsed-DC PECVD technique has attracted attention in this field due to its making it possible to grow a-C:H films at low-pressures (up to 0.1 Pa) in a collision less regime, leading to the achievement of improved mechanical and tribological properties. The incorporation of an additional cathode allows the confinement of electrons and ions, stabilizing and densifying the cold plasma at much lower pressure than conventional PECVD systems. This method is distinguished by higher energy and acceleration of the C+ ions, simpler reactor system equipment, and lower operating cost. In the present investigation, hydrogenated amorphous carbon films were grown on AISI 316 stainless steel using a thin amorphous silicon interlayer to improve interface adherence. The characterization of the coatings allowed identifying the influence of the deposition pressure on the microstructural, mechanical, and tribological properties and the film's adherence. The main results indicate that obtaining films with high hardness, low compressive stress, low coefficient of friction, high wear resistance, and appropriate adhesion is possible at deposition pressures almost 100 times lower than conventional PECVD techniques.
AreaFISMAT
Arrangement 1urlib.net > Fonds > Produção pgr ATUAIS > CMS > Effect of low-pressure...
Arrangement 2urlib.net > BDMCI > Fonds > Produção a partir de 2021 > CGCE > Effect of low-pressure...
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4. Conditions of access and use
Languageen
Target File1-s2.0-S0257897222006375-main.pdf
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Visibilityshown
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5. Allied materials
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Citing Item Listsid.inpe.br/bibdigital/2022/04.03.23.11 2
DisseminationWEBSCI; PORTALCAPES; COMPENDEX.
Host Collectionurlib.net/www/2021/06.04.03.40
6. Notes
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